Job Information

ASML Surface Chemist for reactive plasma – surface interactions in Veldhoven, Netherlands

Surface Chemist for reactive plasma – surface interactions

Location: Veldhoven, Netherlands

Level: PhD

Experience: 2-5 Professional

Functional Area: Research & Development

Background: Chemistry / Material Science

Travel: No

Reference: req9126


ASML is a leading

manufacturer of lithography equipment. In the latest systems, light, plasma and

materials interact at surfaces. Optimizing processes requires a profound

understanding of surface chemistry, plasma-material interactions and of photon

induced processes. Since ASML works at cutting edge technology, a lot of

phenomena are very unique and have a first-of-a-kind character.

Job Mission

To strengthen the chemistry competence, ASML Research is looking

for a Surface Chemist or Surface Scientist, who can add value to the understanding of

reactive plasma-surface interactions.

Job Description

You will work in a multidisciplinary team with Chemists,

Physicists, Electrical and Mechanical engineers.

You have a profound understanding of the

reactions and processes occurring at and below surfaces exposed to a plasma.

Based on high-level problem descriptions you can define hypotheses on

underlying mechanisms and relevant experimental tests.

Subsequently you are

able to perform these tests and translate the results into kinetic equations,

models, and design rules to improve product performance.

Next to this, the job involves

experiments in a laboratory with UHV equipment and low-pressure discharges.


(Technical) University PhD

in Chemistry, Heterogeneous catalysis with experience in experimental approaches, Surface science with a focus on molecular

interactions. Relevant 2-5 years of experience is appreciated.


  • Knowledge of reactive

processes on surfaces and with materials at low pressures involving gas phase

species, including radicals and ions.

  • (Basic) knowledge of plasma physics.

  • Familiarity with concepts of heterogenic

catalysis like adsorption processes, Langmuir-Hinshelwood, Eley- Redeal

mechanisms, lattice structures of adsorbates, surface and sub-surface diffusion.

  • Understanding of the thermomechanical

stability of thin films on materials against external stress factors such as

temperature, chemical reactions etc.

  • Experience with chemical modeling, i.e. with DFT

and/or MD would give you a head-start.

  • Experience with surface analysis methods (XPS,

Raman, IR, AFM,).

Personal skills

  • Open to learning techniques

outside of the above mentioned fields in the future.

  • Combining both an interest

and capability in modeling of surface processes, whilst also being

experimentally capable.

  • Autonomous

while driving to success in a highly skilled team of experts towards a

common goal.

  • Pragmatic

attitude with an analytical view.

Context of the position

The Research Materials Science and Chemistry group is part of the Research department of ASML. This group identifies and fills in

technological gaps in the future roadmap of lithography and the lithography

market. Our focus is on advanced material research and on the interaction of

light (13.5 nm) with the gaseous background in our tools and on solid materials.

We work in small teams and deliver solutions that can be transferred to

Development and Engineering. We work together with external research institutes

and universities.

Other information

Keywords:Chemistry, Chemical Physics, Surface Chemistry, Plasma

Physics , Material science, Heterogenic Catalysis, DFT

REQ ID: req9126